Ohun alumọni Carbide Cantilevers Faili
Ọja alaye ati ohun elo
Agbara ikojọpọ wafer nla okun silikoni carbide SiSiC / SiC cantilever paddle / tan ina jẹ o dara fun ikojọpọ adaṣe robot ati ẹrọ mimu nitori o ni iṣẹ iduroṣinṣin, aiṣe-ibajẹ ni iwọn otutu giga ati agbara ikojọpọ wafer nla. Niwọn igba ti apakan ti paadi oju cantilever jẹ idurosinsin laisi abawọn, o ṣee ṣe lati ṣe wafer titobi nla ni lilo awọn tubes ileru tẹlẹ. Agbara ikojọpọ wafer nla silikoni carbide SiSiC / SiC cantilever paddle / tan ina le ṣee lo si LPVCD lori ipilẹ ti imugboroosi imugboroosi igbona iru rẹ pẹlu awọ LPVCD, eyiti o mu gigun itọju ati gigun kẹkẹ pọ si pupọ, ati dinku awọn eeyan ni pataki.
Awọn iṣiro imọ-ẹrọ ti ifasita ohun alumọni carbide RBSIC:
| ohun kan | kuro | data |
| Otutu ti ohun elo | ℃ | 1380 |
| iwuwo | G / cm3 | > = 3.02 |
| Ṣii porosity | % | <0.1 |
| Iwọn ti Iwa lile Moh | 13 | |
| Agbara atunse | Mpa | 250 (20 ℃) |
| Mpa | 280 (1200 ℃) | |
| Modulu ti rirọ | Gpa | 330 (20 ℃) |
| Gpa | 300 (1200 ℃) | |
| Iwa eledumare | W / mk | 45 (1200 ℃) |
| Olùsọdipúpọ ti imugboroosi gbona | K-1 * 10-6 | 4,5 |
| Ipilẹ ẹri-acid | O dara julọ |
Awọn ẹya ara ẹrọ:
a. Ko deform ni iwọn otutu giga ati agbara ikojọpọ wafer tobi;
b. O tayọ resistance-mọnamọna gbona ati igbesi aye iṣẹ pipẹ;
c. Olumulo imugboroosi ti imularada ti fifẹ cantilever jẹ kekere lalailopinpin, eyiti o fa gigun itọju ati gigun kẹkẹ lọpọlọpọ;
ati dinku awọn eefin
Miiran kiln aga ṣe nipasẹ ohun alumọni carbide seramiki
Yato si Ifarahan sintered ohun alumọni carbide SiSiC cantilever paddle fun wafer loading, a tun gbe awọn miiran kiln aga pẹlu RBSIC / SISIC ohun alumọni carbide nibiti, noi Falopiani, ajija nozzle tube, swirl nozzle tube, oxide mnu SIC ohun alumọni carbide batts / setter awo ati RBSIC itutu oniho .
Wọ awọn ọja RBSIC / SISIC silikoni carbide
Nitori ọja RBSIC / SISIC silikoni carbide wa ni awọn anfani ti imunilara yiya ti o dara julọ, idiwọ ibajẹ ati igbesi aye iṣẹ pipẹ, o tun le ṣe sinu awọn aṣọ wiwọ asọ ti o le fi sori ẹrọ ni rọọrun ninu awọn paipu processing tabi awọn iji lile.
